Satoshi Tanaka
General Manager at Toshiba Memory Corp
SPIE Involvement:
Conference Program Committee | Author
Publications (75)

Proceedings Article | 26 March 2019
Proc. SPIE. 10957, Extreme Ultraviolet (EUV) Lithography X
KEYWORDS: Lithography, Lithographic illumination, Scanning electron microscopy, Photomasks, Extreme ultraviolet, Line width roughness, Extreme ultraviolet lithography, Line edge roughness, Tantalum, Semiconducting wafers

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Lithography, Mirrors, Optical design, Reticles, Optical lithography, Polarization, Process control, Projection systems, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Semiconducting wafers

Proceedings Article | 18 March 2016
Proc. SPIE. 9776, Extreme Ultraviolet (EUV) Lithography VII
KEYWORDS: Mirrors, Contamination, Metals, Germanium, Silicon, Hydrogen, Reflectivity, Extreme ultraviolet, Aluminum, Extreme ultraviolet lithography, Chemical elements, Zirconium

SPIE Journal Paper | 11 March 2016
JM3 Vol. 15 Issue 02
KEYWORDS: Computer engineering, Photomasks, Optical lithography, Double patterning technology, Computer programming, Overlay metrology, Detection and tracking algorithms, Communication engineering, Lithography, Logic

Proceedings Article | 26 March 2015
Proc. SPIE. 9427, Design-Process-Technology Co-optimization for Manufacturability IX
KEYWORDS: Fabrication, Lithography, Logic, Optical lithography, Computer programming, Photomasks, Extreme ultraviolet, Double patterning technology, Overlay metrology, Design for manufacturability

Showing 5 of 75 publications
Conference Committee Involvement (3)
International Conference on Extreme Ultraviolet Lithography 2019
16 September 2019 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography 2018
17 September 2018 | Monterey, California, United States
International Conference on Extreme Ultraviolet Lithography
11 September 2017 | Monterey, California, United States
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