Saumil S. Shah
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Data modeling, Ions, Silicon, 3D modeling, Transistors, Line edge roughness, TCAD, Device simulation, Instrument modeling

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