Saumil Shah
at Blaze DFM Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 1 April 2008
Proc. SPIE. 6925, Design for Manufacturability through Design-Process Integration II
KEYWORDS: Mathematical modeling, Oxides, Ions, Diffusion, Manufacturing, Capacitance, Transistors, Optimization (mathematics), TCAD, Standards development

Proceedings Article | 14 March 2006
Proc. SPIE. 6156, Design and Process Integration for Microelectronic Manufacturing IV
KEYWORDS: Lithography, Databases, Error analysis, Resistance, Capacitance, Shape analysis, Optical proximity correction, Critical dimension metrology, Device simulation, Resolution enhancement technologies

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