Dr. Schang-jing Hon
at Epistar Corp
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 15, 2008
Proc. SPIE. 6894, Gallium Nitride Materials and Devices III
KEYWORDS: Polishing, Light emitting diodes, Metals, Manufacturing, Resistance, Gallium nitride, Sapphire, Semiconducting wafers, Wafer bonding, Chemical mechanical planarization

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