Scott Corboy
Marketing Manager at KLA-Tencor Singapore
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 March 2009
Proc. SPIE. 7272, Metrology, Inspection, and Process Control for Microlithography XXIII
KEYWORDS: Wafer-level optics, Lithography, Metrology, Optical lithography, Etching, Scatterometry, Process control, Integrated optics, High volume manufacturing, Semiconducting wafers

Proceedings Article | 4 December 2008
Proc. SPIE. 7140, Lithography Asia 2008
KEYWORDS: Wafer-level optics, Lithography, Metrology, Optical lithography, Etching, Scatterometry, Process control, Integrated optics, High volume manufacturing, Semiconducting wafers

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