Mr. Scott J. Hafeman
Researcher at
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | May 28, 2004
Proc. SPIE. 5377, Optical Microlithography XVII
KEYWORDS: Optical transfer functions, Point spread functions, Scattering, Light scattering, Manufacturing, Fourier transforms, Feature extraction, Photomasks, Optical proximity correction, Convolution

PROCEEDINGS ARTICLE | June 26, 2003
Proc. SPIE. 5040, Optical Microlithography XVI
KEYWORDS: Polarization, Imaging systems, Scattering, 3D modeling, Image quality, Image filtering, Photomasks, Immersion lithography, Scanning tunneling microscopy, Liquids

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