Dr. Scott D. Hector
Mask Strategy Program Manager
SPIE Involvement:
Publications (48)

Proceedings Article | 20 October 2006 Paper
Proceedings Volume 6349, 634929 (2006) https://doi.org/10.1117/12.692826
KEYWORDS: Photomasks, Yield improvement, Semiconductors, Lithography, Phase shifts, Semiconducting wafers, Manufacturing, Defect inspection, Integrated circuits, Metrology

Proceedings Article | 27 June 2006 Paper
Proceedings Volume 6281, 628101 (2006) https://doi.org/10.1117/12.692622
KEYWORDS: Photomasks, Extreme ultraviolet, Binary data, Manufacturing, Mask making, Beam shaping, Semiconductors, Manufacturing equipment, Optical proximity correction, Yield improvement

Proceedings Article | 21 June 2006 Paper
Proceedings Volume 6281, 628103 (2006) https://doi.org/10.1117/12.692628
KEYWORDS: Photomasks, Binary data, Manufacturing, Data processing, Optical proximity correction, Data conversion, Microelectronics, Printing, Pellicles, Semiconductors

Proceedings Article | 8 November 2005 Paper
Proceedings Volume 5992, 599228 (2005) https://doi.org/10.1117/12.637597
KEYWORDS: Photomasks, Extreme ultraviolet, Optical lithography, Instrument modeling, Inspection, Lithography, Mask making, Resolution enhancement technologies, Semiconductors, Defect inspection

Proceedings Article | 4 November 2005 Paper
Proceedings Volume 5992, 599202 (2005) https://doi.org/10.1117/12.613333
KEYWORDS: Photomasks, Manufacturing, Binary data, Data processing, Microelectronics, Databases, Semiconductors, Semiconductor manufacturing, Glasses, Phase shifts

Showing 5 of 48 publications
Conference Committee Involvement (7)
Photomask and Next-Generation Lithography Mask Technology XIII
18 April 2006 | Yokohama, Japan
Optical Microlithography XIX
21 February 2006 | San Jose, California, United States
Photomask Technology
3 October 2005 | Monterey, California, United States
Photomask and Next-Generation Lithography Mask Technology XII
13 April 2005 | Yokohama, Japan
Photomask Technology
14 September 2004 | Monterey, California, United States
Showing 5 of 7 Conference Committees
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