Scott C. Heinbuch
PhD Student at Colorado State Univ
SPIE Involvement:
Author
Publications (7)

Proceedings Article | 21 June 2017
Proc. SPIE. 10236, Damage to VUV, EUV, and X-ray Optics VI
KEYWORDS: Statistical analysis, Molecules, X-rays, Inspection, Physics, Atomic force microscopy, Extreme ultraviolet, Aluminum, Nuclear physics, Pulsed laser operation

Proceedings Article | 19 May 2011
Proc. SPIE. 8077, Damage to VUV, EUV, and X-ray Optics III
KEYWORDS: Ultraviolet radiation, X-rays, Ionizing radiation, Electrons, Argon ion lasers, Extreme ultraviolet, Aluminum, Pulsed laser operation, Double sideband modulation, Single sideband modulation

Proceedings Article | 29 September 2009
Proc. SPIE. 7451, Soft X-Ray Lasers and Applications VIII
KEYWORDS: Carbon, Chemical species, Metals, Photons, Ions, Single photon, Laser ablation, Ionization, Aluminum, X-ray lasers

Proceedings Article | 18 May 2009
Proc. SPIE. 7361, Damage to VUV, EUV, and X-Ray Optics II
KEYWORDS: Microscopes, Mirrors, Polymethylmethacrylate, Argon, Capillaries, Ions, Physics, Extreme ultraviolet, Spherical lenses, Plasma

Proceedings Article | 3 April 2008
Proc. SPIE. 6921, Emerging Lithographic Technologies XII
KEYWORDS: Oxides, Carbon, Mirrors, Metals, Silicon, Oxygen, Ionization, Extreme ultraviolet, Zirconium, Ruthenium

Showing 5 of 7 publications
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