Dr. Scott W. LeFevre
SPIE Involvement:
Publications (4)

Proceedings Article | 1 May 2023 Presentation + Paper
Osakpolo Isowamwen, Nathan Marchack, Devi Koty, Qingyun Yang, Hien Nguyen, Steve Molis, Scott Lefevre, Marco Hopstaken, Andy Metz, Jeff Shearer, Robert Bruce
Proceedings Volume 12499, 124990H (2023) https://doi.org/10.1117/12.2658564
KEYWORDS: Etching, Passivation, Ions, Sustainability, Plasma etching, Scanning electron microscopy, Semiconductors, Semiconductor manufacturing, Semiconducting wafers, Plasma

Proceedings Article | 25 May 2022 Presentation + Paper
John Papalia, Devi Koty, Nathan Marchack, Scott Lefevre, Qingyun Yang, Aelan Mosden, Sebastian Engelmann, Robert Bruce
Proceedings Volume 12056, 1205603 (2022) https://doi.org/10.1117/12.2614264
KEYWORDS: Etching, Polymers, Diffusion, Plasma etching, Ions, Silicon, Plasma, Semiconducting wafers, Scanning electron microscopy, Deep reactive ion etching, Reactive ion etching, Packaging

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10146, 1014603 (2017) https://doi.org/10.1117/12.2260479
KEYWORDS: Directed self assembly, Plasma etching, Optical lithography, Etching, Logic, Lithography, Manufacturing, Nanofabrication, Silicon, Metals, Extreme ultraviolet, Line edge roughness, Optical alignment, Critical dimension metrology

Proceedings Article | 13 September 2007 Paper
Proceedings Volume 6658, 665812 (2007) https://doi.org/10.1117/12.734032
KEYWORDS: Crystals, Polymers, Chlorine, Field effect transistors, Thin films, Grazing incidence, Atomic force microscopy, Semiconductors, Annealing, Polymer thin films

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