Dr. Scott W. LeFevre
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 27 March 2017
Proc. SPIE. 10146, Advances in Patterning Materials and Processes XXXIV
KEYWORDS: Lithography, Logic, Optical lithography, Etching, Metals, Silicon, Manufacturing, Extreme ultraviolet, Directed self assembly, Plasma etching, Optical alignment, Critical dimension metrology, Line edge roughness, Nanofabrication

Proceedings Article | 13 September 2007
Proc. SPIE. 6658, Organic Field-Effect Transistors VI
KEYWORDS: Semiconductors, Thin films, Polymers, Annealing, Crystals, Atomic force microscopy, Field effect transistors, Chlorine, Grazing incidence, Polymer thin films

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