Dr. Scott A. Middlebrooks
Chief Technical Officer at
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | July 1, 2003
Proc. SPIE. 5044, Advanced Process Control and Automation
KEYWORDS: Mathematical modeling, Reticles, Metrology, Statistical analysis, Sensors, Error analysis, Process control, Semiconducting wafers, Overlay metrology, Process modeling

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