Dr. Scott D. Schuetter
Research Assistant at Univ of Wisconsin Madison
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | April 1, 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Liquids, Velocity measurements, Fluid dynamics, Capillaries, Image processing, Data modeling, Interfaces, Semiconducting wafers, Chromium, Microfluidics

PROCEEDINGS ARTICLE | October 20, 2006
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Semiconductors, Microfluidics, Data modeling, Capillaries, Interfaces, Solids, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids

PROCEEDINGS ARTICLE | June 21, 2006
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Optical lithography, Capillaries, Image processing, Interfaces, Immersion lithography, Velocity measurements, Semiconducting wafers, Wafer testing, Fluid dynamics, Liquids

PROCEEDINGS ARTICLE | April 11, 2006
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Lithography, Polymers, Fourier transforms, Photoresist materials, Line width roughness, Immersion lithography, Line edge roughness, Thin film coatings, Photoresist processing, Semiconducting wafers

SPIE Journal Paper | April 1, 2006
JM3 Vol. 5 Issue 02

PROCEEDINGS ARTICLE | March 21, 2006
Proc. SPIE. 6154, Optical Microlithography XIX
KEYWORDS: Computational fluid dynamics, Microfluidics, Data modeling, Capillaries, Image processing, Immersion lithography, Semiconducting wafers, Fluid dynamics, Liquids, Protactinium

Showing 5 of 9 publications
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