Dr. Scott D. Schuetter
Research Assistant at Univ of Wisconsin-Madison
SPIE Involvement:
Author
Publications (9)

SPIE Journal Paper | 1 April 2007
JM3 Vol. 6 Issue 02
KEYWORDS: Liquids, Velocity measurements, Fluid dynamics, Capillaries, Image processing, Data modeling, Interfaces, Semiconducting wafers, Chromium, Microfluidics

Proceedings Article | 20 October 2006 Paper
Proc. SPIE. 6349, Photomask Technology 2006
KEYWORDS: Liquids, Immersion lithography, Interfaces, Data modeling, Solids, Semiconducting wafers, Fluid dynamics, Capillaries, Microfluidics, Semiconductors

Proceedings Article | 21 June 2006 Paper
Proc. SPIE. 6281, 22nd European Mask and Lithography Conference
KEYWORDS: Semiconducting wafers, Liquids, Immersion lithography, Wafer testing, Fluid dynamics, Image processing, Velocity measurements, Optical lithography, Capillaries, Interfaces

Proceedings Article | 11 April 2006 Paper
Proc. SPIE. 6153, Advances in Resist Technology and Processing XXIII
KEYWORDS: Thin film coatings, Lithography, Polymers, Line edge roughness, Semiconducting wafers, Photoresist processing, Line width roughness, Immersion lithography, Photoresist materials, Fourier transforms

SPIE Journal Paper | 1 April 2006
JM3 Vol. 5 Issue 02

Showing 5 of 9 publications
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