Mode size adapters that are needed to interconnect two planar waveguides of different sizes have been designed and
fabricated by the imprinting lithography. Optimum dimensions of the adapters were determined by simulation. The input
port of the mode size adapters has fixed cross section size of 10 μm wide and 7 μm height. From the simulation results,
the output port should have the lowest optical loss at 5μm in height and 8μm in width. Molds for the imprint were
prepared by noble hybrid imprint lithography which employed both imprinting and photolithography and fabrication of
mode size adapters with smooth and sloped taper region was successfully demonstrated.