Mr. Se-Hyun Ahn Profile

Se-Hyun Ahn

at Univ of Michigan

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Publications (1)

Proceedings Article | 24 February 2009 Paper

High-speed roll-to-roll nanoimprint lithography on flexible substrate and mold-separation analysis

Se Hyun Ahn, L. Jay Guo

Proceedings Volume 7205, 72050U (2009) https://doi.org/10.1117/12.809821

KEYWORDS: Nanoimprint lithography, Ultraviolet radiation, Positron emission tomography, Coating, Liquids, Nanostructures, Optical lithography, Silicon, Nanolithography, Photoresist processing

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