Se-Hyun Ahn
at Univ of Michigan
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | February 24, 2009
Proc. SPIE. 7205, Advanced Fabrication Technologies for Micro/Nano Optics and Photonics II
KEYWORDS: Nanostructures, Optical lithography, Ultraviolet radiation, Silicon, Coating, Nanoimprint lithography, Photoresist processing, Positron emission tomography, Nanolithography, Liquids

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