Se-Jin Park
Manager at Semiconductor Manufacturing International Corp
SPIE Involvement:
Publications (6)

Proceedings Article | 25 September 2010 Paper
Proceedings Volume 7823, 78233E (2010)
KEYWORDS: Optical proximity correction, Photomasks, Logic, Metals, Resolution enhancement technologies, Model-based design, Semiconducting wafers, Optical lithography, Databases, Logic devices

Proceedings Article | 7 March 2008 Paper
Se-Jin Park, Jae-Kyung Seo, ChengHe Li, Daisy Liu, Petros An, Xiao-Hui Kang, Eric Guo
Proceedings Volume 6924, 69243O (2008)
KEYWORDS: SRAF, Photomasks, Optical proximity correction, Lithography, Semiconducting wafers, Phase shifts, Lithographic illumination, Metals, Scanners, Logic

Proceedings Article | 20 May 2006 Paper
Se-Jin Park, Kyung-Hee Yoon, Jae-Hyun Kang, Jae-Young Choi, Yong-Suk Lee, Keeho Kim
Proceedings Volume 6283, 62831K (2006)
KEYWORDS: Photomasks, Semiconducting wafers, Deep ultraviolet, Lithography, Laser systems engineering, Electron beam lithography, Critical dimension metrology, Scanners, Back end of line, Data modeling

Proceedings Article | 21 March 2006 Paper
Proceedings Volume 6154, 61544B (2006)
KEYWORDS: Photomasks, Semiconducting wafers, Critical dimension metrology, Optical proximity correction, Lithography, Electroluminescence, Process control, Optical lithography, Reticles, Cadmium

Proceedings Article | 20 March 2006 Paper
Se-Jin Park, Yeon-Ah Shim, Jae-Hyun Kang, Jae-Young Choi, Kyung-Hee Yoon, Yong-Suk Lee, Keeho Kim
Proceedings Volume 6154, 61543K (2006)
KEYWORDS: Photomasks, Optical proximity correction, Semiconducting wafers, Electroluminescence, Critical dimension metrology, Lithography, Data modeling, Error analysis, Logic, Etching

Showing 5 of 6 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top