Dr. Sean Jeffrey Barstow
Sr. Manager, Product Management & Marketing at Intermolecular Inc
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 24 July 2002
Proc. SPIE. 4690, Advances in Resist Technology and Processing XIX
KEYWORDS: Oxides, Lithography, Electron beam lithography, Electron beams, Etching, Metals, Oxygen, Photomasks, Reactive ion etching, Plasma

Proceedings Article | 1 July 2002
Proc. SPIE. 4688, Emerging Lithographic Technologies VI
KEYWORDS: Oxides, Carbon, Lithography, Capacitors, Etching, Metals, Ultraviolet radiation, Dielectrics, Barium, Strontium

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