Dr. Sébastien Barnola
Head of Plasma Etching & Stripping Laboratory at CEA-LETI
SPIE Involvement:
Publications (22)

Proceedings Article | 12 March 2024 Presentation + Paper
Proceedings Volume 12838, 1283802 (2024) https://doi.org/10.1117/12.2692660
KEYWORDS: Skin, Photoacoustic spectroscopy, Glucose, Sensors, Quantum cascade lasers, Design, Algorithm development, Blood, Clinical trials

Proceedings Article | 23 March 2020 Paper
Salma Younesy, Camille Petit-Etienne, Sébastien Barnola, Pascal Gouraud, Gilles Cunge
Proceedings Volume 11329, 113290V (2020) https://doi.org/10.1117/12.2549210
KEYWORDS: Plasma etching, Indium, Ions, Tin

Proceedings Article | 10 April 2017 Presentation + Paper
S. Landis, H. Teyssedre, G. Claveau, I. Servin, F. Delachat, M. L. Pourteau, A. Gharbi, P. Pimenta Barros, R. Tiron, L. Nouri, N. Possemé, M. May, P. Brianceau, S. Barnola, Y. Blancquaert, J. Pradelles, P. Essomba, A. Bernadac, B. Dal'zotto, S. Bos, M. Argoud, G. Chamiot-Maitral, A. Sarrazin, C. Tallaron, C. Lapeyre, L. Pain
Proceedings Volume 10149, 101490K (2017) https://doi.org/10.1117/12.2259966
KEYWORDS: Directed self assembly, Lithography, Line width roughness, Nanoimprint lithography, Semiconducting wafers, Etching, Electron beam lithography, System on a chip, Critical dimension metrology, Photoresist processing

Proceedings Article | 23 March 2016 Paper
A. Sarrazin, N. Posseme, P. Pimenta Barros, S. Barnola, G. Claveau, A. Gharbi, M. Argoud, G. Chamiot-Maitral, R. Tiron, C. Nicolet, C. Navarro, C. Cardinaud
Proceedings Volume 9782, 97820G (2016) https://doi.org/10.1117/12.2220586
KEYWORDS: Directed self assembly, Polymethylmethacrylate, Chemistry, Picosecond phenomena, Etching, Xenon, Plasma, Carbon monoxide, Plasma etching, Semiconducting wafers

Proceedings Article | 23 March 2016 Paper
E. Pargon, G. Gay, C. Petit-Etienne, M. Brihoum, M. Bizouerne, P. Burtin, S. Barnola
Proceedings Volume 9782, 97820C (2016) https://doi.org/10.1117/12.2221903
KEYWORDS: Plasma etching, Semiconducting wafers, Photonic integrated circuits, Semiconductor lasers, Silicon photonics, Optoelectronics, Silica, Anisotropic etching, Neodymium, Ions, Oxygen

Showing 5 of 22 publications
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