Sebastien Jean-Pascal Pacchini
at Lab d'Analyse et d'Architecture des Systemes
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | September 4, 2008
Proc. SPIE. 7037, Carbon Nanotubes and Associated Devices
KEYWORDS: Silica, Metals, Annealing, Nickel, Dielectrics, Silicon, Chemical vapor deposition, Reactive ion etching, Microwave radiation, Nanoelectromechanical systems

PROCEEDINGS ARTICLE | September 4, 2008
Proc. SPIE. 7037, Carbon Nanotubes and Associated Devices
KEYWORDS: Capacitors, Electrodes, Dielectrics, Numerical modeling, Capacitance, Algorithm development, Microwave radiation, Nanoelectromechanical systems, Electromechanical design, Carbon nanotubes

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