Dr. Sebastien P. Pochon
Senior Applications Engineer at Oxford Instruments Plasma Technology Ltd
SPIE Involvement:
Author
Publications (5)

PROCEEDINGS ARTICLE | March 20, 2018
Proc. SPIE. 10589, Advanced Etch Technology for Nanopatterning VII
KEYWORDS: Etching, Argon, Ions, Photoresist materials, Ion beams, Photomasks, Aluminum, Reactive ion etching, Chlorine, Plasma

PROCEEDINGS ARTICLE | September 19, 2016
Proc. SPIE. 9974, Infrared Sensors, Devices, and Applications VI
KEYWORDS: Oxides, Vanadium, Thin films, Sputter deposition, Resistance, Oxygen, Ion beams, Thin film deposition, Semiconducting wafers, Oxidation

PROCEEDINGS ARTICLE | September 26, 2013
Proc. SPIE. 8816, Nanoengineering: Fabrication, Properties, Optics, and Devices X
KEYWORDS: Thin films, Contamination, Silica, Etching, Argon, Sputter deposition, Metals, Ions, Xenon, Ion beams

PROCEEDINGS ARTICLE | September 1, 2004
Proc. SPIE. 5452, Semiconductor Lasers and Laser Dynamics
KEYWORDS: Reflectors, Mirrors, Modulation, Mode locking, Reflectivity, Semiconductor lasers, Frequency modulation, Nonlinear optics, Pulsed laser operation, Chaos

PROCEEDINGS ARTICLE | November 4, 2002
Proc. SPIE. 4809, Nanoscale Optics and Applications
KEYWORDS: Nanoparticles, Particles, Interfaces, Reflectivity, Photonics, Nonlinear optics, Solids, Gallium, Temperature metrology, Liquids

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