Sedat Pala
Graduate Student Researcher at University of California, Berkeley
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | August 30, 2017
Proc. SPIE. 10404, Infrared Sensors, Devices, and Applications VII
KEYWORDS: Mathematical modeling, Bolometers, Microelectromechanical systems, Infrared detectors, Resonators, Silicon, Temperature sensors, Deep reactive ion etching

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