Dr. Sedat F. Tardu
Associate Professor at INP Grenoble
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 30, 2003
Proc. SPIE. 5342, Micromachining and Microfabrication Process Technology IX
KEYWORDS: Lithography, Sensors, Calibration, Etching, Silicon, Resistance, Finite element methods, Deep reactive ion etching, Semiconducting wafers, Protactinium

PROCEEDINGS ARTICLE | December 23, 2003
Proc. SPIE. 5345, Microfluidics, BioMEMS, and Medical Microsystems II
KEYWORDS: Microfluidics, Lithium, Dielectrics, Interfaces, Ions, Numerical simulations, Distortion, Solids, Fluid dynamics, Liquids

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