Dr. Seema Vinayak
at Solid State Physics Lab
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 15 October 2012 Paper
Proc. SPIE. 8549, 16th International Workshop on Physics of Semiconductor Devices
KEYWORDS: Etching, Ions, Surface roughness, Photoresist materials, Gallium nitride, Aluminum, Plasma etching, Chlorine, Anisotropic etching, Plasma

Proceedings Article | 15 September 1995 Paper
Proc. SPIE. 2636, Microelectronic Device and Multilevel Interconnection Technology
KEYWORDS: Gold, Multilayers, Sputter deposition, Metals, Dielectrics, Gallium arsenide, Silicon, Platinum, Silicon films, Plasma enhanced chemical vapor deposition

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top