KEYWORDS: Control systems design, Control systems, Vibration control, System identification, Semiconductor manufacturing, Vibration isolation, Systems modeling, Model-based design, Optical isolators, Structural design
In high-speed and high-precision control of a precision stage for semiconductor manufacturing, vibration of the
axially moving factors leads to operational problems and limits their utility in many applications. Reaction force
and vibration controls are a key to improve the control performance.
In this paper, the novel design method of the precision position control system integrated with both the
reaction force control and the vibration control system is proposed. The proposed method is constructed of the
multi-input and multi-output (MIMO) modeling based on the subspace method and the controller design based
on the position control, decoupling control and vibration control. In the design of the complex control system,
the design parameters are only the identified plant model and the control bandwidth. The effectiveness of the
proposed integrated design method is verified through the experiments using the developed 6-degree-of-freedom
(6DOF) experimental setup.
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