Dr. Seiji Morita
Director at Business Innovation Partners Co.,Ltd.
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 28 March 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Lithography, Optical lithography, Dry etching, Metals, Annealing, Resistance, Scanning electron microscopy, Organic materials, Directed self assembly, Double patterning technology, Immersion lithography, Reactive ion etching, Semiconducting wafers, Molecular self-assembly

Proceedings Article | 4 April 2016
Proc. SPIE. 9777, Alternative Lithographic Technologies VIII
KEYWORDS: Lithography, Optical lithography, Quartz, Image processing, Coating, Line width roughness, Directed self assembly, Nanoimprint lithography, Line edge roughness, Photoresist processing

Proceedings Article | 2 April 2014
Proc. SPIE. 9050, Metrology, Inspection, and Process Control for Microlithography XXVIII
KEYWORDS: Semiconductors, Nanotechnology, Lithography, Defect detection, Ultraviolet radiation, Inspection, Optical inspection, Organic materials, Optical resolution, Semiconducting wafers

Proceedings Article | 28 March 2014
Proc. SPIE. 9049, Alternative Lithographic Technologies VI
KEYWORDS: Lithography, Electron beam lithography, Optical lithography, Polymers, Ultraviolet radiation, Scanning electron microscopy, Organic materials, Directed self assembly, Extreme ultraviolet lithography, Line edge roughness

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