Sen-Yih Chou
R&D Engineer at Industrial Technology Research Institute
SPIE Involvement:
Author
Publications (2)

SPIE Journal Paper | March 2, 2012
OE Vol. 51 Issue 02
KEYWORDS: High dynamic range imaging, CCD cameras, Reflectivity, Digital Light Processing, Cameras, Calibration, Inspection, Spatial resolution, Phase shifts, Modulation

SPIE Journal Paper | August 1, 2008
OE Vol. 47 Issue 08
KEYWORDS: Overlay metrology, Diffraction, Diffraction gratings, Scatterometry, Scatter measurement, Signal processing, Optical design, Optical engineering, Critical dimension metrology, Reflectivity

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