Seo-Min Kim
Senior MTS at SK Hynix Inc
SPIE Involvement:
Publications (21)

Proceedings Article | 27 March 2017 Paper
Proceedings Volume 10146, 1014627 (2017)
KEYWORDS: Etching, System on a chip, Process control, Factor analysis, Semiconductors, Tolerancing, Semiconducting wafers, Photoresist processing, Optical lithography, Plasma, Inspection

Proceedings Article | 7 April 2015 Paper
Seo-Min Kim, Chang-Moon Lim, Mi-Rim Jung, Young-Sik Kim, Won-Taik Kwon, Chang-Nam Ahn, Kyu-Tae Sun, Anita Fumar-Pici, Alek Chen
Proceedings Volume 9422, 94220M (2015)
KEYWORDS: Stochastic processes, Photomasks, Absorption, Critical dimension metrology, Extreme ultraviolet, Immersion lithography, Lithography, Photoresist processing, Line width roughness, Particles

Proceedings Article | 6 April 2015 Paper
Yoonsuk Hyun, Jinsoo Kim, Kyuyoung Kim, Sunyoung Koo, SeoMin Kim, Youngsik Kim, Changmoon Lim, Nohjung Kwak
Proceedings Volume 9422, 94221U (2015)
KEYWORDS: Photomasks, Particles, Scanners, Extreme ultraviolet lithography, Semiconducting wafers, Pellicles, Extreme ultraviolet, Inspection, Reticles, Scanning electron microscopy

Proceedings Article | 16 March 2015 Paper
Proceedings Volume 9422, 94220S (2015)
KEYWORDS: Optical lithography, Photomasks, Photoresist processing, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Electroluminescence, Image processing, Stochastic processes, Scanners

Proceedings Article | 17 April 2014 Paper
Byoung-Hoon Lee, Inhwan Lee, Yoonsuk Hyun, SeoMin Kim, Chang-Moon Lim, Myoung Soo Kim, Sung-ki Park
Proceedings Volume 9048, 90480R (2014)
KEYWORDS: Extreme ultraviolet, Photomasks, Semiconducting wafers, Overlay metrology, Extreme ultraviolet lithography, EUV optics, Manufacturing, Lithography, Reflectivity, Interferometers

Showing 5 of 21 publications
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