Seok Hwan Lee
at Yonsei Univ
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | April 6, 2009
Proc. SPIE. 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009
KEYWORDS: Actuators, Optical lithography, Polymers, Composites, Resistance, Platinum, Capacitance, Plasma etching, Process modeling, Plasma

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