Seok Hwan Lee
at Yonsei Univ
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 6 April 2009
Proc. SPIE. 7287, Electroactive Polymer Actuators and Devices (EAPAD) 2009
KEYWORDS: Plasma etching, Plasma, Platinum, Resistance, Actuators, Capacitance, Polymers, Composites, Process modeling, Optical lithography

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