In this paper, we report a research effort to design, analyze, and fabricate a novel type of microaccelerometer using UV lithography of SU-8 and UV-LIGA process. Instead of using SU-8 only as photo resist as in silicon-based MEMS fabrication processes, cured SU-8 was used as the primary structural material in fabricating the micro sensors. A
commercial software, ANSYS, was used to design the suitable size for the spring-mass and capacitors to achieve the desired bandwidth and the maximum sensitivity. The preliminary results obtained so far have proved the feasibility of fabrication of micro accelerometer using cured SU-8 polymer as the primary structural material and using UV-LIGA as the major fabrication tool.
A novel type of micro power relay has been designed and fabricated using UV-LIGA technology. The relay is based on electrostatic actuation and SU-8 was used as a functional material. The unique character of this novel power relay is that other than a SU-8 structure used both as an electrical insulator and a mechanical connector, all other components are made of metal or alloys. Because UV-LIGA technology has the advantages of broad material selection and the capability of making high aspect ratio microstructures, the technology is best suited for fabricating microelectromechanical power relays. A multi-step, multi-layer UV-LIGA process has been successfully developed and a prototype relay has been successfully fabricated.