Dr. Seokhan Park
at Samsung Electronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2017 Presentation + Paper
Seokhan Park, Jemin Park, Hyun-Woo Kim, ES Jung, Joonsoo Park, Changhyun Cho, Hyeongsun Hong, Kyupil Lee
Proceedings Volume 10144, 101440F (2017) https://doi.org/10.1117/12.2257638
KEYWORDS: Polymethylmethacrylate, Polymers, Lithography, Thermodynamics, Silica, Optical spheres, Directed self assembly, Picosecond phenomena, Semiconductors, Scanning electron microscopy, Extreme ultraviolet, Etching, Optical lithography

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