Dr. Seokhan Park
at Samsung Electronics
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 21 March 2017
Proc. SPIE. 10144, Emerging Patterning Technologies
KEYWORDS: Semiconductors, Lithography, Optical lithography, Optical spheres, Polymethylmethacrylate, Silica, Etching, Polymers, Scanning electron microscopy, Extreme ultraviolet, Directed self assembly, Picosecond phenomena, Thermodynamics

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