Dr. Seongbo Shim
Principal Engineer, Ph.D.
SPIE Involvement:
Publications (14)

Proceedings Article | 10 April 2024 Paper
Proceedings Volume 12953, 1295309 (2024) https://doi.org/10.1117/12.3010718
KEYWORDS: Extreme ultraviolet, Mirrors, Light sources and illumination, Semiconducting wafers, Simulations, Nanoimprint lithography, Metrology, Critical dimension metrology, Source mask optimization, Phase shifts

Proceedings Article | 30 March 2017 Paper
Proceedings Volume 10147, 101471D (2017) https://doi.org/10.1117/12.2257904
KEYWORDS: 3D modeling, Lithography, Image processing, 3D image processing, Artificial neural networks, Computer simulations, Photoresist processing, Machine learning, Etching, Resistance, Metals, Data modeling, Standards development

Proceedings Article | 23 March 2016 Paper
Proceedings Volume 9782, 97820O (2016) https://doi.org/10.1117/12.2219057
KEYWORDS: Etching, Artificial neural networks, Optical proximity correction, Machine learning, Optical lithography, Critical dimension metrology, Neural networks, Geometrical optics

Proceedings Article | 15 March 2016 Paper
Proceedings Volume 9780, 97800H (2016) https://doi.org/10.1117/12.2219073
KEYWORDS: Metals, Bessel functions, Raster graphics

Proceedings Article | 19 March 2015 Paper
Seongbo Shim, Sibo Cai, Jaewon Yang, Seunghune Yang, Byungil Choi, Youngsoo Shin
Proceedings Volume 9423, 94231E (2015) https://doi.org/10.1117/12.2085644
KEYWORDS: Global Positioning System, Lithography, Machine learning, Photomasks, Polymers, Optical lithography, Optical proximity correction, 193nm lithography, Electrical engineering, Directed self assembly

Showing 5 of 14 publications
  • View contact details

Is this your profile? Update it now.
Don’t have a profile and want one?

Back to Top