Dr. Seong-Min Ma
at SK Hynix
SPIE Involvement:
Author
Publications (1)

PROCEEDINGS ARTICLE | March 29, 2013
Proc. SPIE. 8685, Advanced Etch Technology for Nanopatterning II
KEYWORDS: Optical lithography, Etching, Particles, Inspection, Scanning electron microscopy, Bridges, Thin film coatings, Semiconducting wafers, Channel projecting optics, Defect inspection

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