Dr. Seonghyun Ko
at POSTECH
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | December 21, 2007
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Mathematical modeling, Microelectromechanical systems, Thin films, Silicon, Manufacturing, Reliability, Silicon films, Low pressure chemical vapor deposition, Spherical lenses, Semiconducting wafers

PROCEEDINGS ARTICLE | April 11, 2007
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Microsystems, Manufacturing, Corrosion, Platinum, Microelectronics, Chemical reactions, Mechanical engineering, Semiconducting wafers, Wafer testing, Microcrystalline materials

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