Dr. Seonghyun Ko
at POSTECH
SPIE Involvement:
Author
Publications (2)

Proceedings Article | 21 December 2007 Paper
Proc. SPIE. 6798, Microelectronics: Design, Technology, and Packaging III
KEYWORDS: Silicon, Silicon films, Thin films, Low pressure chemical vapor deposition, Reliability, Manufacturing, Microelectromechanical systems, Semiconducting wafers, Mathematical modeling, Spherical lenses

Proceedings Article | 11 April 2007 Paper
Proc. SPIE. 6528, Nanosensors, Microsensors, and Biosensors and Systems 2007
KEYWORDS: Platinum, Microcrystalline materials, Microelectronics, Microsystems, Manufacturing, Corrosion, Mechanical engineering, Wafer testing, Semiconducting wafers, Chemical reactions

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