Mr. Seok-jun Hong Profile

Seok-jun Hong

at Seoul National Univ

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Publications (2)

Proceedings Article | 18 March 2014 Paper

Imaging performance of attenuated phase-shift mask using coherent scattering microscope

Jae Uk Lee, SeeJun Jeong, Seong Chul Hong, Seung Min Lee, Jinho Ahn

Proceedings Volume 9048, 90481X (2014) https://doi.org/10.1117/12.2045877

KEYWORDS: Photomasks, Phase shifts, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Microscopes, Inspection, Scattering, Diffraction, Binary data

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Proceedings Article | 24 October 2012 Paper

Laminated cubic biodegradable polymer structures for bacteria-based, robotic drug delivery

Hyung Jung Yoo, Sangmin Lee, Jae Hyun Ahn, Seok-jun Hong, Minjae Lee, Jong Mo Seo, Tae You Kim, Sung Jae Kim, Dong-il "Dan" Cho

Proceedings Volume 8548, 85483S (2012) https://doi.org/10.1117/12.2000219

KEYWORDS: Polymers, X-rays, Polymer thin films, Semiconducting wafers, Photoresist materials, Photomasks, Synchrotron radiation, Silicon, Gold, Robotics

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