The half-tone phase shift mask (PSM) has been suggested for better imaging performances like image contrast,
NILS and H-V bias compared to the binary mask (BIM) in EUV lithography. In this paper, we measured
imaging performance of a fabricated half-tone attenuated PSM with Coherent Scattering Microscopy (CSM) and
the results were compared with simulation data obtained by EM-suite tool. We prepared a half-tone attenuated
PSM which has 12.7% reflectivity and 180° phase shift with absorber stack of 16.5mn-thick TaN absorber and
24nm-thick Mo phase shifter. With CSM, an actinic inspection tool, we measured the imaging properties of
PSM. The diffraction efficiencies of BIM were measured as 31%, 36%, and 44% for 88 nm, 100 nm, and 128
nm mask CD, respectively, while those of PSM were measured as 45%, 62%, and 81%. Also the aerial image at
wafer level obtained by CSM with high volume manufacturing tool’s (HVM) illumination condition (NA=0.33,
σ=0.9) showed higher image contrast and NILS with phase shift effect. And the measured data were consistent
with the simulation data.
Recently, a bacteria-based drug delivery system has been proposed to achieve effective and localized drug delivery. Researchers have shown that flagellated bacteria have a chemotactic property to tumor cells, and they can be used as an energy source for active drug delivery. Our previous results have reported that a circular droplet made by a biodegradable polymer can be used in this bacteria-based, robotic drug delivery. In this paper, using laminated cubic structures made of several layers of biodegradable polymers for bacteria-based microrobot is proposed. The structures are made by laminating polymer layers and then, micromachining them using a deep X-ray synchrotron radiation into 40 μm x 40 μm x 40 μm cubes. The cubic structure is more beneficial in attaching bacteria in only selective surface directions than a circular structure, and in controlling the volume of drugs to be encapsulated with the outer polymer layer.