Seok-jun Hong
at Seoul National Univ
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | March 18, 2014
Proc. SPIE. 9048, Extreme Ultraviolet (EUV) Lithography V
KEYWORDS: Microscopes, Diffraction, Scattering, Inspection, Photomasks, Extreme ultraviolet, Extreme ultraviolet lithography, Nanoimprint lithography, Binary data, Phase shifts

PROCEEDINGS ARTICLE | October 24, 2012
Proc. SPIE. 8548, Nanosystems in Engineering and Medicine
KEYWORDS: Gold, Polymers, X-rays, Silicon, Robotics, Photoresist materials, Photomasks, Synchrotron radiation, Semiconducting wafers, Polymer thin films

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