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Sepideh Naserbakht
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Publications (1)
Proceedings Article | 28 February 2020 Paper
Coupled MOEMS membranes for enhanced sensing purposes
Proceedings Volume 11293, 112930X (2020) https://doi.org/10.1117/12.2553523
KEYWORDS: Microopto electromechanical systems, Modulation, Silicon, Solids, Optomechanical design, Actuators, Photonics, Optical resonators, Nonlinear response, Sensing systems
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