Dr. Sergei Magonov Profile

Dr. Sergei Magonov

Senior Staff Scientist at Bruker AXS Inc

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Publications (1)

Proceedings Article | 23 November 2005 Paper

Atomic force microscopy at the 100-nm scale: practical, theoretical, and metrological outlook

S. Magonov

Proceedings Volume 6002, 60020S (2005) https://doi.org/10.1117/12.637486

KEYWORDS: Atomic force microscopy, Silicon, Visualization, Image resolution, Scanning probe microscopy, Silicon carbide, Crystals, Surface roughness, Microscopes, Image analysis

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