Sergey N. Averkin
at Institute of Physics and Technology
SPIE Involvement:
Author
Publications (1)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Etching, Silicon, Plasma, Oxidation, Oxides, Semiconducting wafers, Plasma etching, Photomasks, Oxygen, Fluorine

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