Dr. Sergey Babin
President at Abeam Technologies Inc
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Publications (77)

Proceedings Article | 21 August 2020 Paper
Proc. SPIE. 11490, Interferometry XX
KEYWORDS: Light sources, Metrology, Spatial frequencies, Interferometers, Calibration, Zoom lenses, Modulation transfer functions, Binary data, Fizeau interferometers

Proceedings Article | 25 March 2019 Paper
Proc. SPIE. 10960, Advances in Patterning Materials and Processes XXXVI
KEYWORDS: Lithography, Data modeling, Scattering, Sensors, Polymers, Spectroscopy, Electrons, Photoresist materials, Extreme ultraviolet, Extreme ultraviolet lithography

Proceedings Article | 18 August 2018 Paper
Proc. SPIE. 10749, Interferometry XIX
KEYWORDS: Monochromatic aberrations, Visualization, Spatial frequencies, Interferometers, Modulation transfer functions, Fizeau interferometers

Proceedings Article | 28 March 2018 Paper
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Signal to noise ratio, Imaging systems, Interference (communication), Scanning electron microscopy, Image quality, Optical resolution, Image display, Semiconducting wafers

Proceedings Article | 19 March 2018 Presentation
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Metrology, Manufacturing, Scanning electron microscopy, Transmission electron microscopy, Image processing software, 3D metrology, Process control, Semiconductor manufacturing, Critical dimension metrology, Semiconducting wafers

Showing 5 of 77 publications
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