Sergey V. Dubkov
SPIE Involvement:
Author
Publications (3)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Thin films, Diffraction, Nanoparticles, Metals, Particles, Crystals, Nickel, Transmission electron microscopy, Raman spectroscopy, Niobium

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Gold, Carbon, Thin films, Magnesium, Chemical species, Metals, Annealing, Particles, Silver, Transmission electron microscopy

PROCEEDINGS ARTICLE | December 18, 2014
Proc. SPIE. 9440, International Conference on Micro- and Nano-Electronics 2014
KEYWORDS: Carbon, Nanostructures, Silicon, Chemical vapor deposition, Plasma enhanced chemical vapor deposition, Deposition processes, Niobium, Semiconducting wafers, Carbon monoxide, Temperature metrology

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