Dr. Sergey A. Gavrilov Profile

Dr. Sergey A. Gavrilov

at National Research Univ of Electronic Technology

SPIE Involvement:

Author

Publications (20)

Proceedings Article | 30 December 2016 Paper

Metal-assisted chemical etching of silicon with different metal films and clusters: a review

A. Dudin, O. Pyatilova, S. Gavrilov, A. Sysa, A. Savitskiy, A. Shuliatyev, A. Pavlov

Proceedings Volume 10224, 1022405 (2016) https://doi.org/10.1117/12.2266862

KEYWORDS: Nanostructuring, Detection and tracking algorithms, Etching, Metals, Nickel, Silicon, Silver, Silicon films, Wet etching, Semiconducting wafers

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Proceedings Article | 30 December 2016 Paper

Application of porous alumina formed in selenic acid solution for nanostructures investigation via Raman spectroscopy

Y. Nazarkina, S. Gavrilov, A. Polohin, D. Gromov, Y. Shaman

Proceedings Volume 10224, 102240J (2016) https://doi.org/10.1117/12.2267148

KEYWORDS: Oxides, Nanostructures, Nanostructuring, Matrices, Luminescence, Composites, Raman spectroscopy, Nanomaterials, Aluminum, Cadmium sulfide

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Proceedings Article | 30 December 2016 Paper

Study of morphological characteristic of por-Si formed using metal-assisted chemical etching by BET-method and fractal geometry

Anton Boyko, Rustam Kalmykov, Dahir Gaev, Sergei Timoshenkov, Sergei Gavrilov, Olga Pyatilova

Proceedings Volume 10224, 102240H (2016) https://doi.org/10.1117/12.2267147

KEYWORDS: Detection and tracking algorithms, Etching, Metals, Silicon, Scanning electron microscopy, Solids, Adsorption, Fractal analysis, Wet etching, Thermodynamics

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Proceedings Article | 30 December 2016 Paper

The features of CNT growth on catalyst-content amorphous alloy layer by CVD-method

S. Dubkov, S. Bulyarskii, A. Pavlov, A. Trifonov, E. Kitsyuk, P. Mierczynski, T. Maniecki, R. Ciesielski, S. Gavrilov, D. Gromov

Proceedings Volume 10224, 102240L (2016) https://doi.org/10.1117/12.2267052

KEYWORDS: Thin films, Diffraction, Nanoparticles, Metals, Particles, Crystals, Nickel, Transmission electron microscopy, Raman spectroscopy, Niobium

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Proceedings Article | 30 December 2016 Paper

Investigation of the phase formation from nickel coated nanostructured silicon

Dmitry Smirnov, Sergey Gavrilov, Yulia Shilyaeva, Olga Pyatilova, Alexandra Yu. Berezkina, Artem Sysa, Alexander Dudin

Proceedings Volume 10224, 102240E (2016) https://doi.org/10.1117/12.2264593

KEYWORDS: Diffraction, Nanostructuring, Statistical analysis, Metals, X-rays, Nickel, Silicon, Heat treatments, Chemical analysis, Plating

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Proceedings Article | 18 December 2014 Paper

Reversible and non-reversible changes in nanostructured Si in humid atmosphere

V. Zhigalov, O. Pyatilova, S. Timoshenkov, S. Gavrilov

Proceedings Volume 9440, 94400B (2014) https://doi.org/10.1117/12.2180958

KEYWORDS: Polishing, Nanostructuring, Etching, Molecules, Silicon, Scanning electron microscopy, Atmospheric physics, Humidity, Semiconducting wafers, Chemisorption

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Proceedings Article | 18 December 2014 Paper

Different methods of forming multicomponent metal sulfide by SILAR-techniques

A. Zheleznyakova, S. Gavrilov, A. Dronov, A. Presnukhina, E. Popova

Proceedings Volume 9440, 94400I (2014) https://doi.org/10.1117/12.2180700

KEYWORDS: Semiconductors, Thin films, Metals, Solar cells, Copper, Interfaces, Ions, Zinc, Thin film solar cells, Tin

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Proceedings Article | 18 December 2014 Paper

Nanostructured chalcogenide materials for memory switching devices

O. Pyatilova, S. Gavrilov, R. Rozanov, A. Zheleznyakova, A. Belov, V. Shevyakov

Proceedings Volume 9440, 944007 (2014) https://doi.org/10.1117/12.2179474

KEYWORDS: Thin films, Switching, Metals, Copper, Ions, Chalcogenides, Atomic force microscopy, Scanning electron microscopy, Bismuth, Thin film deposition

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Proceedings Article | 18 December 2014 Paper

Aluminum anodization process modeling approach

Alexey Belov, Maksim Vorobiev, Sergey Gavrilov, Vasiliy Shevyakov

Proceedings Volume 9440, 94400Z (2014) https://doi.org/10.1117/12.2179218

KEYWORDS: Oxides, Polishing, Metals, Interfaces, Ions, Numerical simulations, 3D modeling, Oxygen, Aluminum, Oxidation

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