Dr. Sergey Yu Shevchenko
at Saint Petersburg Electrotechnical Univ "LETI"
SPIE Involvement:
Author
Publications (4)

Proceedings Article | 16 May 2017
Proc. SPIE. 10231, Optical Sensors 2017
KEYWORDS: Microelectromechanical systems, Optical lithography, Resonators, Sensors, Quartz, Metals, Copper, Laser ablation, Photomasks, Aluminum, Acoustics, Semiconducting wafers

Proceedings Article | 9 November 2016
Proc. SPIE. 10018, Advanced Laser Processing and Manufacturing
KEYWORDS: Optical lithography, Resonators, Sensors, Quartz, Laser ablation, Photomasks, Wave sensors, Acoustics, Semiconducting wafers, Optical calibration

Proceedings Article | 21 October 2016
Proc. SPIE. 9986, Unmanned/Unattended Sensors and Sensor Networks XII
KEYWORDS: Optical lithography, Resonators, Sensors, Quartz, Electrodes, Metals, Laser ablation, Wave sensors, Acoustics, Semiconducting wafers

Proceedings Article | 13 October 2015
Proc. SPIE. 9647, Unmanned/Unattended Sensors and Sensor Networks XI; and Advanced Free-Space Optical Communication Techniques and Applications
KEYWORDS: Reflectors, Resonators, Sensors, Remote sensing, Wave propagation, Antennas, Phase measurement, Gyroscopes, Acoustics, Phase shifts

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