Laser ablation technique is promising for production of surface acoustic wave (SAW) sensors complicated topologies. Its main advantages in comparison to a photolithography method are: simplicity in pattern creation, no need in photomasks, possible to work with thick metallization (up to 20 μm), possibility to correct topology after the sensor sealing and others. This work discusses possible error sources, including side heating of metal films, and presents results of first characteristics evaluation for experimental delay lines produced by laser technology.
Nowadays surface acoustic wave sensors are produced using a photolithography method. It is expensive in small series production and do not allow further topology correction, which is important for inertial sensors. In this case, a laser ablation method seems promising. It does not require a photomask and can achieve a good matching of topologies produced on opposite sides of the wafer. Several delay lines were produced using a proposed technique. Its characteristics were explored and discussed.
Nowadays surface acoustic wave (SAW) sensors are produced using a photolithography method. In case of inertial sensors it suffers several disadvantages, such as difficulty in matching topologies produced on opposite sides of the wafer, expensive in small series production, not allowing further topology correction. In this case a laser ablation method seems promising. Details of a proposed technique are described in the paper along with results of its experimental test and discussion.
A great number of design concepts of surface acoustic wave (SAW)-based gyroscopes was proposed through the last decade mainly due to their unique robustness and ability to survive extremely high shocks. At the same time, these devices are small, cheap and easy to produce. Later publications offered a novel idea of constructing a fully passive and wireless gyroscope using SAW-based elements. Although this idea is very attractive, proposed design concepts rise a number of questions. This paper is dedicated to give a short overview of existing design concepts, focusing on details of its operation. Moreover, a new design concept utilizing a single delay line and a phase detector is proposed.