With these proceedings we present μ-diffraction-based overlay (μDBO) targets that are well below the currently supported minimum size of 10×10 μm<sup>2</sup> . We have been capable of measuring overlay targets as small as 4×4 μm<sup>2</sup> with our latest generation YieldStar system. Furthermore we find an excellent precision (TMU < 0.33 nm for 6 × 6 μm<sup>2</sup> ) without any compromise on throughput (MAM time < 60 ms). At last a study that compares four generations of YieldStar systems show clearly that the latest generation YieldStar systems is much better capable of reading small overlay targets such that the performance of a 16 × 16 μm<sup>2</sup> on an early generation YieldStar 2nd-gen is comparable to that of a 8 × 8 μm<sup>2</sup> on the latest YieldStar 5th-gen. This work enables a smaller metrology footprint, more placement flexibility and in-die overlay metrology solutions.
The fundamental mechanism of the optical power loss of Gaussian light beam in dielectric corner reflector is
examined i.e. diffractional scattering on the edge of corner reflector. Estimated value of relative losses is obtained
for both polarizations of light beam with Goos-Haenchen shift taken into account. For the wave polarized
parallel to the edge of corner reflector for the incident angle α =π/4 the estimated value is
(W<sub>difr</sub>/W<sub>0</sub>)<sub>H</sub> is approximately equal to 3.82(λ<sub>0</sub>/a), and for transverse polarization is (W<sub>difr</sub>/W<sub>0</sub>)<sub>E</sub> is approximately equal to 7.03(λ<sub>0</sub>/a). Here λ<sub>0</sub> is the optical
wavelength in vacuum and a is the effective beam radius.
We analyze the radiation pressure-induced dynamics of a Fabry-Perot cavity with the movable mirror in the
field of weak plane gravitational wave (GW) with arbitrary reasonable frequency. The obtained response signal
of such GW detector contains mechanical resonant multiplier due to the phenomenon of optical rigidity which
appears in the radiation pressure-driven cavity detuned from resonance. Using the obtained results we study the
possibility of resonant detection of high-frequency GWs.