Dr. Sergey P. Tarabrin
Technical Competence Leader at ASML Netherlands BV
SPIE Involvement:
Author
Publications (3)

Proceedings Article | 13 March 2018
Proc. SPIE. 10585, Metrology, Inspection, and Process Control for Microlithography XXXII
KEYWORDS: Diffraction, Metrology, Photons, Semiconducting wafers, Overlay metrology, Diffraction gratings

Proceedings Article | 5 March 2008
Proc. SPIE. 7009, Second International Conference on Advanced Optoelectronics and Lasers
KEYWORDS: Reflectors, Mirrors, Prisms, Gaussian beams, Reflection, Scattering, Dielectrics, Light scattering, Magnetism, Dielectric polarization

Proceedings Article | 9 July 2007
Proc. SPIE. 6727, ICONO 2007: Nonlinear Laser Spectroscopy and High-Precision Measurements; and Fundamentals of Laser Chemistry and Biophotonics
KEYWORDS: LIGO, Mirrors, Fabry–Perot interferometers, Oscillators, Interferometers, Sensors, Interference (communication), Antennas, Signal detection, Phase shifts

SIGN IN TO:
  • View contact details

UPDATE YOUR PROFILE
Is this your profile? Update it now.
Don’t have a profile and want one?

Advertisement
Advertisement
Back to Top