Prof. Sergey P. Timoshenkov
Professor, Head of Chair at National Research Univ of Electronic Technology
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Author
Publications (19)

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Thin films, Etching, Electrodes, Germanium, Atomic force microscopy, Microelectronics, Chemical elements, Antimony, Tellurium

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Glasses, Crystals, Germanium, Chalcogenides, Liquid crystals, Chemical elements, Selenium, Tellurium, Binary data, Liquids

PROCEEDINGS ARTICLE | December 30, 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Detection and tracking algorithms, Etching, Metals, Silicon, Scanning electron microscopy, Solids, Adsorption, Fractal analysis, Wet etching, Thermodynamics

PROCEEDINGS ARTICLE | September 23, 2016
Proc. SPIE. 9939, Light Manipulating Organic Materials and Devices III
KEYWORDS: Thermography, Polymers, Ultraviolet radiation, Dielectrics, Resistance, Heat treatments, Transmittance, Dysprosium, Electro optics, Active optics

PROCEEDINGS ARTICLE | December 22, 2015
Proc. SPIE. 9668, Micro+Nano Materials, Devices, and Systems
KEYWORDS: Actuators, Mirrors, Silica, Silicon, Microactuators, Aluminum, Chemical elements

PROCEEDINGS ARTICLE | December 22, 2015
Proc. SPIE. 9668, Micro+Nano Materials, Devices, and Systems
KEYWORDS: Carbon, Electronics, Silicon, Bioalcohols, Diodes, Microelectronics, Silicon carbide, Microwave radiation, Semiconducting wafers, Plasma

Showing 5 of 19 publications
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