Prof. Sergey P. Timoshenkov
Professor, Head of Chair at National Research Univ of Electronic Technology
SPIE Involvement:
Author
Publications (22)

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Switches, Chemical species, Glasses, Crystals, Chalcogenides, Chemical elements, Thallium, Gallium, Tellurium, Binary data

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Etching, Polymers, Dielectrics, Silicon, Manufacturing, Plasma etching, Adhesives

Proceedings Article | 15 March 2019
Proc. SPIE. 11022, International Conference on Micro- and Nano-Electronics 2018
KEYWORDS: Microelectromechanical systems, Sensors, Etching, Electrodes, Silicon, Manufacturing, Control systems, Finite element methods, Chemical elements, Plasma

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Detection and tracking algorithms, Etching, Metals, Silicon, Scanning electron microscopy, Solids, Adsorption, Fractal analysis, Wet etching, Thermodynamics

Proceedings Article | 30 December 2016
Proc. SPIE. 10224, International Conference on Micro- and Nano-Electronics 2016
KEYWORDS: Oxides, Thin films, Etching, Electrodes, Germanium, Atomic force microscopy, Microelectronics, Chemical elements, Antimony, Tellurium

Showing 5 of 22 publications
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