Dr. Sergey V. Zakharov
at NAEXTSTREAM
SPIE Involvement:
Author
Publications (6)

SPIE Journal Paper | 7 June 2012
Peter Choi, Sergey Zakharov, Raul Aliaga-Rossel, Aldrice Bakouboula, Otman Benali, Philippe Bove, Michèle Cau, Grainne Duffy, Osamu Iwase, Keith Powell, Blair Lebert, Ouassima Sarroukh, Clement Zaepffel, Vasily Zakharov
JM3, Vol. 11, Issue 02, 021107, (June 2012) https://doi.org/10.1117/12.10.1117/1.JMM.11.2.021107
KEYWORDS: Extreme ultraviolet, Plasma, Inspection, Metrology, Xenon, Multiplexing, Light sources, Ions, Tin, Capillaries

Proceedings Article | 8 April 2011 Paper
S. Zakharov, V. Zakharov, P. Choi, A. Krukovskiy, V. Novikov, A. Solomyannaya, A. Berezin, A. Vorontsov, M. Markov, S. Parot'kin
Proceedings Volume 7969, 796932 (2011) https://doi.org/10.1117/12.881637
KEYWORDS: Plasma, Extreme ultraviolet, Electrons, Ions, Modeling, Capillaries, Ionization, Particles, Extreme ultraviolet lithography, Nanoparticles

Proceedings Article | 8 April 2011 Paper
Peter Choi, Sergey Zakharov, Raul Aliaga-Rossel, Aldrice Bakouboula, Jeremy Bastide, Otman Benali, Philippe Bove, Michèle Cau, Grainne Duffy, Carlo Fanara, Wafa Kezzar, Blair Lebert, Keith Powell, Ouassima Sarroukh, Luc Tantart, Clement Zaepffel, Vasily Zakharov
Proceedings Volume 7969, 796935 (2011) https://doi.org/10.1117/12.892554
KEYWORDS: Extreme ultraviolet, Plasma, Photodiodes, Data modeling, Tin, Multiplexing, Extreme ultraviolet lithography, Light sources, Photomasks, Capillaries

Proceedings Article | 23 March 2010 Paper
Peter Choi, Sergey Zakharov, Raul Aliaga-Rossel, Aldrice Bakouboula, Jeremy Bastide, Otman Benali, Philippe Bove, Michèle Cau, Grainne Duffy, Wafa Kezzar, Blair Lebert, Keith Powell, Ouassima Sarroukh, Luc Tantart, Edmund Wyndham, Clement Zaepffel, Vasily Zakharov
Proceedings Volume 7636, 76363B (2010) https://doi.org/10.1117/12.848477
KEYWORDS: Extreme ultraviolet, Plasma, Multiplexing, Metrology, Photomasks, Inspection, Capillaries, Light sources, EUV optics, Photodiodes

Proceedings Article | 23 March 2010 Paper
Proceedings Volume 7636, 76363A (2010) https://doi.org/10.1117/12.848473
KEYWORDS: Extreme ultraviolet, Plasma, Xenon, Electrons, Capillaries, Ions, Ionization, Modeling, Light sources, Metrology

Showing 5 of 6 publications
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