Dr. Sergiu Langa
at Fraunhofer IPMS
SPIE Involvement:
Author
Publications (2)

PROCEEDINGS ARTICLE | February 20, 2017
Proc. SPIE. 10116, MOEMS and Miniaturized Systems XVI
KEYWORDS: Microelectromechanical systems, Actuators, Etching, Electrodes, Silicon, Transducers, Aluminum, Field emission displays, Semiconducting wafers, Surface micromachining

PROCEEDINGS ARTICLE | March 9, 2013
Proc. SPIE. 8614, Reliability, Packaging, Testing, and Characterization of MOEMS/MEMS and Nanodevices XII
KEYWORDS: Microelectromechanical systems, Packaging, Actuators, Glasses, Interfaces, Silicon, Micromirrors, Semiconducting wafers, Wafer bonding, Laser bonding

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