Dr. Sergiy Yulin
at Fraunhofer IOF
SPIE Involvement:
Author
Publications (40)

Proceedings Article | 13 March 2015 Paper
Proc. SPIE. 9422, Extreme Ultraviolet (EUV) Lithography VI
KEYWORDS: Lithography, Mirrors, Multilayers, Optical properties, Annealing, Interfaces, Diffusion, Reflectivity, Extreme ultraviolet lithography, Lanthanum

Proceedings Article | 1 April 2013 Paper
Proc. SPIE. 8679, Extreme Ultraviolet (EUV) Lithography IV
KEYWORDS: Mirrors, Multilayers, Light sources, Optical coatings, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma, Tin

Proceedings Article | 13 September 2012 Paper
Proc. SPIE. 8450, Modern Technologies in Space- and Ground-based Telescopes and Instrumentation II
KEYWORDS: Amorphous silicon, Reflectors, Mirrors, Astronomy, Polishing, Metals, Silver, Optical coatings, Reflectivity, Optics manufacturing

Proceedings Article | 23 March 2012 Paper
Proc. SPIE. 8322, Extreme Ultraviolet (EUV) Lithography III
KEYWORDS: Mirrors, Multilayers, Light sources, Light scattering, Coating, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, EUV optics, Plasma

Proceedings Article | 19 May 2011 Paper
Proc. SPIE. 8077, Damage to VUV, EUV, and X-ray Optics III
KEYWORDS: Wafer-level optics, Carbon, Mirrors, Contamination, Gases, Reflectivity, Extreme ultraviolet, Extreme ultraviolet lithography, Synchrotron radiation, EUV optics

Showing 5 of 40 publications
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